Ms. Allyson Hartzell has written a book chapter titled “Deposition of Molecular Contaminants in Gaseous Environments” in Contamination Free Manufacturing for Semiconductors and Other Precision Products. Edited by Robert P. Donovan and published by CRC Press, this reference provides in-depth information on the origins, handling, and disposal of a variety of contaminants. Ms. Hartzell’s chapter focuses specifically on the types and properties of airborne molecular contaminants found in a cleanroom and their deposition on wafer surfaces.
Veryst expert writes book chapter on clean manufacturing
March 14, 2001