Webinar on multiphysics modeling for MEMS systems

February 18, 2021
Sense mode and geometry of a simple gyroscope
Sense mode and geometry of a simple gyroscope.

In this webinar sponsored by COMSOL, Dr. James Ransley discussed how to use multiphysics modeling for MEMS systems.

Microelectromechanical systems (MEMS) are fundamentally driven by multiphysics phenomena, and as such, they require a modeling approach where the relevant physical phenomena are included and coupled.  In the presentation, Dr. Ransley discussed the tools required to model a wide range of sensors and transducers.  He also addressed effects such as electromechanical couplings, thin-film damping, thermoelastic damping, and anchor losses. 

The webinar took place on February 18, 2021 and included a live demonstration of equation-based approaches to modeling a MEMS gyroscope using COMSOL Multiphysics.  The webinar concluded with a question and answer session.  Learn more about the webinar.

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